Method for purifying nitrogen trifluoride gas

Details Method for purifying nitrogen trifluoride gas Method for purifying nitrogen trifluoride gas

1989-10-24

1990-06-12

Doll, John

Chemistry of inorganic compounds

Modifying or removing component of normally gaseous mixture

423230, 423236, 423239, 423406, 423240, C01B 2106

Patent

active

049331582

ABSTRACT:
There is here disclosed a method for removing nitrous oxide (N.sub.2 O), carbon dioxide (CO.sub.2) and dinitrogen difluoride (N.sub.2 F.sub.2) from a nitrogen trifluoride gas. The present invention is directed to a method for purifying a nitrogen trifluoride gas which comprises the steps of thermally treating, at a temperature of 250.degree. to 700.degree. C., a zeolite selected from the group consisting of analcime, clinoptilolite, mordenite, ferrierite, phillipsite, chabazite, erionite and laumotite; forming a packed bed of the treated zeolite; and passing the nitrogen trifluoride gas containing the gaseous impurities at a temperature of -125.degree. to 50.degree. C. through the filler layer.

REFERENCES:
patent: 3235474 (1966-02-01), Tompkins et al.
patent: 3356454 (1967-12-01), Tompkins et al.
patent: 4156598 (1979-05-01), Woytek et al.
patent: 4193976 (1980-03-01), Lileck et al.

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