Method for purifying nitrogen trifluoride

Details Method for purifying nitrogen trifluoride Method for purifying nitrogen trifluoride

2006-08-31

2009-08-04

Langel, Wayne (Department: 1793)

Distillation: processes, separatory

With disparate physical separation

C423S406000

Reexamination Certificate

active

07569122

ABSTRACT:
A highly pure nitrogen trifluoride having a carbon tetrafluoride content of 10 ppm or less can be effectively obtained by boiling crude liquid nitrogen trifluoride having carbon tetrafluoride contaminant under a pressure ranging from 35 to 45 atm, to remove carbon tetrafluoride therefrom through vaporization.

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patent: 7384618 (2008-06-01), Singh et al.
patent: 05-70112 (1993-03-01), None
patent: 2001-0031951 (2001-04-01), None
patent: 2003-0070836 (2003-09-01), None

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