Method for purifying hydrogen peroxide for microelectronics uses

Details Method for purifying hydrogen peroxide for microelectronics uses Method for purifying hydrogen peroxide for microelectronics uses

1992-02-26

1993-08-03

Langel, Wayne

Chemistry of inorganic compounds

Oxygen or compound thereof

Peroxide

C01B 1501

Patent

active

052326802

ABSTRACT:
A method for further purifying previously distilled hydrogen peroxide for use in microelectronics in which a hydrogen peroxide starting solution purified initially by distillation is contacted, after the addition of a small amount of chelating agent, with a non-ion-exchanging polymeric adsorbent, such as a styrene-divinylbenzene copolymer, to obtain a highly purified hydrogen peroxide solution which satisfies the stringent purity requirements for use in producing 4-megabit and 16-megabit microprocessor chips.

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patent: 3297404 (1967-01-01), Elliott et al.
patent: 3556727 (1971-01-01), Thirion
patent: 4792403 (1988-12-01), Togo et al.
patent: 4999179 (1991-03-01), Sugihara et al.
patent: 5055286 (1991-10-01), Watanabe et al.

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