Chemistry of inorganic compounds – Halogen or compound thereof – Binary fluorine containing compound
Reexamination Certificate
2005-05-24
2005-05-24
Nguyen, Ngoc-Yen (Department: 1754)
Chemistry of inorganic compounds
Halogen or compound thereof
Binary fluorine containing compound
C423S492000, C423S24000R
Reexamination Certificate
active
06896866
ABSTRACT:
A method for purifying tungsten hexafluoride of high purity, capable of producing tungsten hexafluoride of higher purity than that of the related art, readily and at a low cost. A method for purifying tungsten hexafluoride of high purity, characterized in that tungsten hexafluoride containing molybdenum hexafluoride as an impurity, makes contact with a layer, in which a metal or an alloy is packed, containing at least one of molybdenum, tungsten, copper, nickel, iron, cobalt, zinc, titanium, aluminum, calcium, and magnesium at a temperature ranging from 0° C. to 100° C.
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Fujimoto Kazuyuki
Kikuyama Hirohisa
Nakagawa Yoshinori
Waki Masahide
Knuth Randall J.
Nguyen Ngoc-Yen
Stella Chemifa Kabushiki Kaisha
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