Method for purging an optical lens

Details Method for purging an optical lens Method for purging an optical lens

2007-12-04

2007-12-04

Assouad, Patrick (Department: 2862)

Photocopying

Projection printing and copying cameras

With temperature or foreign particle control

C355S053000, C355S055000

Reexamination Certificate

active

11127304

ABSTRACT:
By a unit for determining fractions of a substance in a gas or gas mixture, measurements are carried out on the gas or gas mixture for purging a lens in a projection apparatus for projecting patterns onto a substrate. The results of a first measurement on the gas fed to the lens are compared with the results of a measurement of the gas removed from the lens. If, the substance is a contaminating substance that leads to a deposit on the lens under the influence of high-energy radiation from an illumination source, the difference is used to infer photochemical reactions on the surface of the lens that lead disadvantageously to the deposition. A signal is generated as a consequence of the comparison and is used to take preventive measures against a degradation of the lens. Mass spectrometers, electric or optical sensors and other known methods for substance analysis are used as measurement units.

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