Method for purging a high purity manifold

Details Method for purging a high purity manifold Method for purging a high purity manifold

2007-11-06

2007-11-06

Douglas, Steven O. (Department: 3771)

Fluent material handling, with receiver or receiver coacting mea

Evacuation apparatus

With filling with gas

C141S065000

Reexamination Certificate

active

11160801

ABSTRACT:
A method for purging a manifold for the delivery of a high purity chemical by injecting of a purge gas into the manifold under vacuum conditions. In one embodiment, the method comprises a first step of injecting a purge gas into the manifold at a first end while applying vacuum at a second end; a second step of closing the first end and evacuating the manifold by applying vacuum at the second end; and a third step of opening the first end and injecting purge gas into the manifold at the first end while applying vacuum at the second end, causing a turbulent flow of the purge gas along the internal walls of the manifold due to the pressure differential between the purge gas and the evacuated manifold. An effective removal of residuals of the high purity chemical within the manifold is thereby achieved.

REFERENCES:
patent: 5657786 (1997-08-01), DuRoss et al.
patent: 5711354 (1998-01-01), Siegele et al.
patent: 6431229 (2002-08-01), Birtcher et al.
patent: 6457494 (2002-10-01), Gregg et al.
patent: 6810897 (2004-11-01), Girard et al.
patent: 6953047 (2005-10-01), Birtcher et al.
patent: 2003/0131885 (2003-07-01), Birtcher et al.

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