Method for providing semiconductor devices

Metal treatment – Compositions – Heat treating

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148187, 29578, H01L 2126

Patent

active

040765571

ABSTRACT:
Methods are disclosed for providing self-aligned barrier and conductor regions in conductively connected charge-coupled devices.

REFERENCES:
patent: 3838438 (1974-09-01), Silversmith et al.
patent: 3853634 (1974-12-01), Amelio et al.
patent: 3865652 (1975-02-01), Agusta et al.
patent: 3927468 (1975-12-01), Anthony et al.
patent: 3930893 (1976-01-01), Tchon
patent: 3931674 (1976-01-01), Amelio
Krambeck et al., IEEE Transactions on Electron Devices, vol. ED-21, No. 1, Jan. 1974, pp. 70-72.
Krambeck et al., IEEE Journal of Solid-State Circuits, vol. SC-9, No. 6, Dec. 1974, pp. 436-443.

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