Method for providing pinhole free dielectric layers

Details Method for providing pinhole free dielectric layers Method for providing pinhole free dielectric layers

1984-06-15

1985-05-28

Silverberg, Sam

Metal treatment

Compositions

Heat treating

148 63, 148 6, C23F 702

Patent

active

045198519

ABSTRACT:
A method is taught for repairing pinholes in dielectric layers and thereby avoiding metal shorts. The method is applied after the dielectric has been deposited on a base of conductive metallurgy and involves heating the metal-dielectric layers in an oxygen ambient and thereby oxidizing any exposed metal. The metal-oxide formed in the pinhole effectively insulates the underlying metal from a subsequently deposited metal; and, hence acts to prevent metal-to-metal shorts.

REFERENCES:
patent: 3939293 (1976-02-01), Brusic

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