Method for providing impurities into a carrier gas line

Details Method for providing impurities into a carrier gas line Method for providing impurities into a carrier gas line

1986-03-21

1988-01-05

Childs, Sadie L.

Fishing, trapping, and vermin destroying

427255, 4272552, 4272557, 4274191, 437225, C23C 1630

Patent

active

047175974

ABSTRACT:
A permeable tube is inserted in a processing gas line to allow impurities surrounding the permeable tube to enter the processing line. By plumbing a steel tube in parallel with the permeable tube the process carrier gas can be switched from one tube to the other in rapid succession to allow pure or impure gases to enter into a reaction chamber. This can permit the growth of alternating layers of differently doped materials. As an example, it has been discovered that incorportaing small amounts of oxygen into an AlGaAs layer will produce a semi-insulating layer.

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patent: 4188244 (1980-02-01), Itoh et al.
patent: 4250205 (1981-02-01), Constant et al.
patent: 4311743 (1982-01-01), Kasper et al.
patent: 4350653 (1982-09-01), Burnett et al.
patent: 4430282 (1984-02-01), Stack
patent: 4561916 (1985-12-01), Akiyama et al.

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