Fishing – trapping – and vermin destroying
Patent
1984-10-05
1987-11-24
Czaja, Donald E.
Fishing, trapping, and vermin destroying
156644, 156653, 156656, 156657, 1566591, 156643, 2041923, 20419232, 437192, B44C 122, H01L 21302, H01L 2131
Patent
active
047087676
ABSTRACT:
Planarized insulating layers provided with planarized contacts are formed on semiconductor devices by forming vias through an insulating layer having a generally planar exposed surface, depositing a layer of a conductive layer on this upper surface of the insulating layer in an amount at least sufficient to at least partially fill all of the vias, depositing a planarized layer on the exposed surface of the conductive layer and then etching away the planarized layer and the conductive layer by use of an etchant that removes the planarized layer and the conductive layer at substantially the same rate, until the generally planar upper surface of the insulating layer is exposed.
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Czaja Donald E.
Hoch Ramon R.
Signetics Corporation
Spain Norman N.
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