Method for protecting extraction electrode during processing of

Details Method for protecting extraction electrode during processing of Method for protecting extraction electrode during processing of

1996-12-27

1999-07-13

Ramsey, Kenneth J.

Electric lamp or space discharge component or device manufacturi

Process

Electrode making

H01J 902

Patent

active

059218380

ABSTRACT:
A method for protecting extraction electrodes (140) during processing of Spindt-tip field emitters (150, 155) includes the steps of: (i) depositing a parting layer (170) on the extraction electrodes (140) and in an interspace region (145) defined by the extraction electrodes (140), (ii) sharpening the Spindt-tip field emitters (150), (iii) depositing a layer (180) of emission-enhancing material on the sharpened field emitters (155) and on the parting layer (170), and (iv) removing the parting layer (170), thereby lifting off the emission-enhancing material from the extraction electrodes (140) and from the interspace region (145), but not from the sharpened field emitters (155).

REFERENCES:
patent: 5141460 (1992-08-01), Jaskie et al.
patent: 5702281 (1997-12-01), Huang et al.
"Field Emission Characteristics of Diamond Coated Silicon Field Emitters" by J. Liu et al., J. Vac. Sci. Technol., 13(2), Mar./Apr. 1995, pp. 422-426.
"Influence of Cathode Material on Emission Characteristics of Field Emitters for Microelectronics Devices" by Junzo Ishikawa et al., J. Vac. Sci. Technol., vol. 11, No. 2, Mar./Apr. 1993, pp. 403-406.
"Effects of Potassium and Lithium Metal Deposition on the Emission Characteristics of Spindt-type Thin-film Field Emission Microcathode Arrays" by A.A. Talin et al., J. Vac. Sci. Technol., 13(2), Mar./Apr. 1995, pp. 448-451.

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