Cleaning and liquid contact with solids – Processes – Including application of electrical radiant or wave energy...
Patent
1993-05-27
1994-11-22
Langel, Wayne
Cleaning and liquid contact with solids
Processes
Including application of electrical radiant or wave energy...
134 2, 134 21, 134902, B08B 700
Patent
active
053665597
ABSTRACT:
A method for processing a substrate surface in a process chamber wherein during chemical or physical altering of the substrate surface a laser beam is projected inside the processing chamber and along a trajectory which does not contact the substrate surface in order to capture particles by means of the photophoretic effect, particles which would otherwise impinge upon and contaminate the substrate surface.
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Dunn Jr. Thomas G.
Langel Wayne
Research Triangle Institute
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