Method for protecting a semiconductor device from radiation indi

Details Method for protecting a semiconductor device from radiation indi Method for protecting a semiconductor device from radiation indi

1981-07-06

1984-01-03

Rutledge, L. Dewayne

Metal working

Method of mechanical manufacture

Electrical device making

29589, 29588, 357 84, H01L 2156

Patent

active

044235488

ABSTRACT:
A structure is provided which affords radiation protection to semiconductor devices and which specifically prevents soft failures in semiconductor memories caused by alpha particle radiation. The protection is provided by a metallic radiation shield formed on but insulated from the semiconductor memory array. The radiation shield is formed on the semiconductor devices while they are still in wafer form but after the normal device fabrication has been completed.

REFERENCES:
Thun, R. E., "Deposited, Noise-Reducing Ground Plane" in IBM-T.D.B., vol. 10, No. 1, Jun. 1967, p. 87.

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