Metal working – Method of mechanical manufacture – Electrical device making
Patent
1988-08-17
1990-04-17
Arbes, Carl J.
Metal working
Method of mechanical manufacture
Electrical device making
148DIG71, 21912119, 357 67, 427 97, H01K 310
Patent
active
049168096
ABSTRACT:
A method for creating a programmable connection by a laser beam in superimposed conductors of an interconnect system of an integrated circuit is provided wherein each of the conductors is formed of a metal strip provided with an upper and a lower film of a material having a melting point substantially higher than a melting point of said metal strip. The conductors are separated by a dielectric layer and the upper conductor is covered by an insulating passivation layer. The connection is effected through an opening in the insulating layer, the upper conductor, the dielectric layer, and at least a portion of said lower conductor. The method for creating the connection consists of applying at least a first laser beam pulse to make an initial opening in at least said insulating layer; and selectively controlling one or more of the parameters of the laser beam, such as power, diameter, number of pulses and duration of pulses. The laser beam is then used to create an opening through the insulating layer, upper conductor, dielectric layer, and through at least a portion of said lower conductor and further forms a substantially continuous ring by controlled melting. The ring begins respectively at the upper and lower conductors and extends between said conductors to form the connection.
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Bonnal Marie-Francoise
Boudou Alain
Arbes Carl J.
Bull S.A.
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