Method for production of trichloromonosilane

Details Method for production of trichloromonosilane Method for production of trichloromonosilane

1989-11-09

1991-01-22

Doll, John

Chemistry of inorganic compounds

Silicon or compound thereof

Halogen containing

75338, 264 12, 423341, 423343, 423348, 423349, C01B 3308, C01B 3302, B29B 900

Patent

active

049869710

ABSTRACT:
The present application relates to a method for production of trichloromonosilane in a fluidized bed reactor by reaction of silicon powder and HCl at a temperature between 280.degree. and 300.degree. C. wherein silicon powder which has been produced by gas atomization of molten silicon is used. The gas atomized silicon powder has a preferred particle size between 1 and 1000 .mu.m.

REFERENCES:
patent: 3592391 (1971-07-01), Bender et al.
patent: 4347199 (1982-08-01), Speier et al.
patent: 4419060 (1983-12-01), Speier et al.
Handbook of Chemistry and Physics, 54th edition, Ed. Weast, p. F-98.

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