Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Responsive to electromagnetic radiation
Reexamination Certificate
2011-01-11
2011-01-11
Lee, Hsien-ming (Department: 2823)
Semiconductor device manufacturing: process
Making device or circuit responsive to nonelectrical signal
Responsive to electromagnetic radiation
C438S069000, C438S097000, C257SE21133
Reexamination Certificate
active
07867812
ABSTRACT:
The invention relates to the formation of thin-film crystalline silicon using a zone-melting recrystallization process in which the substrate is a ceramic material. Integrated circuits and solar cells are fabricated in the recrystallized silicon thin film and lifted off the substrate. Following lift-off, these circuits and devices are self-sustained, lightweight and flexible and the released ceramic substrate can be reused making the device fabrication process cost effective.
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Vu Duy-Phach
Vu Quoc-Bao
Browdy and Neimark , P.L.L.C.
Lee Hsien-Ming
Parendo Kevin
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