Method for production of silica optical fiber preforms

Details Method for production of silica optical fiber preforms Method for production of silica optical fiber preforms

2005-08-16

2005-08-16

Griffin, Steven P. (Department: 1731)

Glass manufacturing

Processes of manufacturing fibers, filaments, or preforms

Process of manufacturing optical fibers, waveguides, or...

C427S575000, C118S72300R

Reexamination Certificate

active

06928839

ABSTRACT:
A device and method is disclosed for manufacturing optical fiber preforms utilizing microwave plasma assisted chemical vapor deposition. Precursor gas is introduced to the face of a vertically mounted dielectric rod, and a plasma is struck by means of simultaneous excitation of an E01type wave and an H type wave with rotating linear polarization. The silica rod is positioned so that its face is at the bottom of the tube. Precursor gas is delivered from a position below the face of the silica rod, and microwave energy, which travels through the rod to the rod face, is delivered from a source positioned above the rod. With this configuration, a uniformly dense plasma localized on the face of the rod can simultaneously deposit both a pure or doped core and a doped cladding. It is also useful for creating waveguides, preform cores for use as substrates in creating optical fiber preforms, capillaries and ceramic rods.

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Nazarov et al., “Plasma-Chemical Deposition Of Nitrides Out of Halogenides”, 5th International Conference APEIE-2000, p. 21-26.

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