Chemistry of inorganic compounds – Boron or compound thereof – Binary compound
Patent
1982-09-09
1985-10-29
Doll, John
Chemistry of inorganic compounds
Boron or compound thereof
Binary compound
423299, 252 623GA, 427 86, 427 87, 4274197, 156610, 156DIG70, 156DIG88, C01B 3504
Patent
active
045500142
ABSTRACT:
A process for producing a free-standing polycrystalline boron phosphide film comprises growing a film of boron phosphide in a vertical growth apparatus on a metal substrate. The metal substrate has a coefficient of thermal expansion sufficiently different from that of boron phosphide that the film separates cleanly from the substrate upon cooling thereof, and the substrate is preferably titanium. The invention also comprises a free-standing polycrystalline boron phosphide film for use in electronic device fabrication.
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Baughman Richard J.
Ginley David S.
Doll John
Hightower Judson R.
Leeds Jackson
McMillan Armand
Sopp Albert
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