Method for production of a mechanical resonator with a...

Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices

Reexamination Certificate

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C310S311000

Reexamination Certificate

active

10511207

ABSTRACT:
The invention relates to the production of a mechanical resonator with a planar monolithic vibrating structure machine in a crystalline material. Where the material is trigonal (1), trigonal (2) or hexagonal in structure, said material is cut in the [001] plane or, where said material is cubic in structure, said material is cut in the [111] plane and the vibration mode of order 2 is used. Where the material is tetragonal (1) or tetragonal (2) or hexagonal said material is cut in the [001] plane or where said material is cubic in structure said material is cut in the [001], [100], or [010] plane and the vibration mode of order 3 is used. The resonator thus has a natural material frequency isotropy (Δfm=0).

REFERENCES:
patent: 6038524 (2000-03-01), Leger et al.
patent: 2002/0158224 (2002-10-01), Aoto et al.
patent: 2003/0015130 (2003-01-01), Lee et al.
patent: 2004/0036971 (2004-02-01), McGuire, Jr.
patent: 2004/0189425 (2004-09-01), Iwashita et al.
patent: 2004/0231581 (2004-11-01), Aoto et al.
patent: 2006/0213429 (2006-09-01), Motoki et al.
patent: 4-249114 (1992-09-01), None

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