Metal fusion bonding – Process – Plural joints
Patent
1999-02-10
2000-09-19
Ryan, Patrick
Metal fusion bonding
Process
Plural joints
B23K 3100, B23K 3102
Patent
active
061199265
ABSTRACT:
On the production of wire connections (wire bonding) which start from a semiconductor chip and end on a substrate (2b) the capillary (12) guiding the wire (3) should be moved to an end section (s3) of its trajectory in a specific, programmed way in order to eliminate as far as possible reactions on the geometry of the wire bridge on bonding of the wire to the substrate and to produce flawless bond connections. The end section (s3) in which the capillary (12) moves slowly begins at a predetermined height (H) and ends on the substrate at the second connection point (5). In the end section (s3) the downward movement (vv) of the capillary is superimposed by a horizontal movement (vh) which is directed away from the already existing connection of the wire (3) to the chip and which continually decreases in relationship to the downward movement (vv).
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Egger Hans
Seidel Marit
von Flue Daniel
ESEC SA
Pittman Zidia
Ryan Patrick
LandOfFree
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