Method for producing ultrathin metal film and ultrathin-thin met

Details Method for producing ultrathin metal film and ultrathin-thin met Method for producing ultrathin metal film and ultrathin-thin met

1988-12-21

1991-02-26

Pianalto, Bernard

Coating processes

Measuring, testing, or indicating

Thickness or uniformity of thickness determined

427 35, 427 36, 427 38, 427 431, 427 531, 427261, 427299, 427333, 427343, 427344, 427404, 4274301, B05D 306

Patent

active

049960750

ABSTRACT:
A responsive film containing a responsible group occuring a chemical reaction by energy beam is formed on an insulated substrate, and energy beam is irradiated in a pattern, and part of the responsive group is selectively deactivated or activated, and only the remaining portion of the responsive group of the responsive film is coupled with a chemical substance containing metal in a later process, and an ultrafine pattern of metal film is formed.

REFERENCES:
patent: 4539061 (1985-09-01), Sagiv
"IEE Proceedings" Section A a I, vol. 130, Part 1, No. 5, pp. 252-255 (1983).

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