Coating processes – Coating by vapor – gas – or smoke – Metal coating
Patent
1995-01-06
1997-12-23
King, Roy V.
Coating processes
Coating by vapor, gas, or smoke
Metal coating
427252, 427250, 427551, 427124, 427314, 202154, C23C 1608
Patent
active
057005192
ABSTRACT:
A method is provided for depositing ultra high purity of greater than 99.998% titanium films which comprises generating gaseous TiI.sub.4 in situ by reacting titanium metal starting material with gaseous iodide in a reaction chamber, purifying the TiI.sub.4 by a double distillation process at reduced pressure to produce ultra high purity of greater than 99.998% TiI.sub.4, transferring the ultra high purity TiI.sub.4 in liquid form to a deposition chamber to vaporize the liquid TiI.sub.4 and contacting a heated titanium substrate with the TiI.sub.4 vapor, thereby depositing the ultra high purity Ti films on the substrate.
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King Roy V.
Materials Research Corp.
Sony Corporation
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