Method for producing trichlorosilane

Chemistry of inorganic compounds – Silicon or compound thereof – Halogen containing

Reexamination Certificate

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C423S347000, C423S349000

Reexamination Certificate

active

07056484

ABSTRACT:
The invention relates to a method for producing trichlorosilane by reacting silicon with hydrogen, silicon tetrachloride and, optionally, hydrogen chloride, whereby the silicon is provided in comminuted form, and the silicon is mixed with a catalyst during comminution.

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K.M. Lewis and D.G. Rethwisch, 1993, Mathematical Modelling of Diffusion and Microkinetics in Direct Reactions of Silicon and in the Processing of Electronic Components,Catalyzed Direct Reactions of Silicon—Elsevier Science Publishers B.V.
K. M. Lewis and D.G. Rethwisch, 1993, By-Products From Waste Treatment for a Bench Scale Trichlorosilane/Tetrachlorosilane Direct Process,Catalyzed Direct Reactions of Silicon—Elsevier Science Publishers B.V.
Jeffrey Y.P. MUI Dietmar Seyferth, Mar. 31, 1979-Apr. 1, 1981, Low-Cost Solar Array Project Silicon Material Task, Final Report on Investigation of the Hydrogenation of SiCl4—Massachusetts Institute of Technology.
Barbara Elvers, Stephen Hawkins, William Russey and Gail Schulz, 1993, Silicon Compounds, Inorganic; vol. A 24, Ullmann's Encyclopedia of Industrial Chemistry, Fifth Completely Revised Edition.
American Chemical Society, 1984, Industrial Inorganics, vol. 101, Chemical Abstracts.
America Chemical Society, 1988, Industrial Inorganics, vol. 109, Chemical Abstracts.

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