Method for producing thin layers on a specific support and...

Semiconductor device manufacturing: process – Bonding of plural semiconductor substrates

Reexamination Certificate

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Details

C438S458000, C438S459000, C438S960000

Reexamination Certificate

active

06939782

ABSTRACT:
The invention relates to a method for producing a thin layer (8) containing at least one component (6, 6A,6B) comprising:—a preparation step, wherein an added layer (2, 3, 4) is created on a support (1), at least one part (2) of said layer being adapted for local embrittling and said substrate and the part which can be embrittled being made from different materials and/or having different microstructures; an embrittlement step, wherein a fragile underlayer (5) is produced in the part which can be embrittled; a work step, wherein at least one component (6, 6A,6B) is created on said added layer; and a separation step, wherein a dissociation is induced in the part which can be embrittled, along said fragile underlayer, in order to produce a thin layer (8) comprising a part of said added layer and said component.

REFERENCES:
patent: 5300788 (1994-04-01), Fan et al.
patent: 6020252 (2000-02-01), Aspar et al.
patent: 6127199 (2000-10-01), Inoue et al.
patent: 6271101 (2001-08-01), Fukunaga
patent: 6534380 (2003-03-01), Yamauchi et al.
patent: 0 767 486 (1997-04-01), None
patent: 0 786 801 (1997-07-01), None
patent: 1 014 452 (2002-06-01), None
patent: 11-233449 (1999-08-01), None
patent: WO 01/11930 (2001-02-01), None

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