Method for producing thin film solar cell

Details Method for producing thin film solar cell Method for producing thin film solar cell

1994-06-10

1997-09-09

Weisstuch, Aaron

Semiconductor device manufacturing: process

Making device or circuit responsive to nonelectrical signal

Responsive to electromagnetic radiation

136256, 136258, 438 97, 438977, H01L 3118, H01L 310368

Patent

active

056656076

ABSTRACT:
In a method for fabricating a thin film solar cell, a thin semiconductor film serving as a power generating layer is formed on a substrate via an intermediate layer, a plurality of holes are formed penetrating through the thin semiconductor film and reaching the intermediate layer, and the intermediate layer is etched away through the through-holes, separating the thin semiconductor film from the substrate with high-efficiency. Since stress is hardly applied to the thin semiconductor film during the separation process, cracking and breaking of the semiconductor film is avoided. Further, since the surface of the substrate is maintained in good condition, the substrate can be reused, resulting in a reduction in the production cost.

REFERENCES:
patent: 3993533 (1976-11-01), Milnes et al.
patent: 4227942 (1980-10-01), Hall
patent: 4255208 (1981-03-01), Deutscher et al
patent: 4727047 (1988-02-01), Bozler et al.
patent: 4861387 (1989-08-01), Matsumoto
patent: 5397713 (1995-03-01), Hamamoto et al.

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