Method for producing thin film of oxide superconductor

Superconductor technology: apparatus – material – process – High temperature – per se – Having tc greater than or equal to 150 k

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505732, 505704, 427 62, 427 38, 427 42, 4271263, 427117, 427314, B05D 512, B05D 306, C23C 1400

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051089840

ABSTRACT:
A thin film of an oxide superconductor having a homogeneous composition and less oxygen defects is produced by independently vaporizing at least one material selected from the group consisting of the elements of Ia, IIa and IIIa groups of the periodic table and their compounds and at least one material selected from the group consisting of the elements of Ib, IIb and IIIb groups of the periodic table and their compounds in the presence of molecular oxygen and depositing the vaporized materials together with oxygen on a substrate to form a thin film of the oxide superconductor.

REFERENCES:
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patent: 4826808 (1989-05-01), Yurek et al.
P. J. Martin et al., "Ion-Beam-Assisted Deposition of Thin Films," Applied Optics, vol. 22, No. 1, Jan. 1, 1983, pp. 178-184.
M. K. Wu et al., "Superconductivity at 93 K in a New Mixed-Phase Y-Ba-Cu-O Compound System at Ambient Pressure," Physical Review Letters, vol. 58, No. 9, Mar. 2, 1987, pp. 908-910.
Cava et al., "Bulk Superconductivity at 36k in La1-8 S10.2CuO4", Phys. Rev. Lett., vol. 58(4) Jan. 1987, pp. 408-410.
Hoffman, et al., "Effect of Substrate Potential on A1203 Films Prepared by Electron Beam Evaporation," J. Vac. Sci. Tech., vol. 9(1), 1972, pp. 326-329.
Hammond et al., "Superconducting Thin Films of the Perovskite Superconductors by Electron-Beam Deposition," Extended Abs. High Temperature Superconductors, Ed. by Gubser et al., Apr. 1987, pp. 169-171.
Hammond, "Synthesis and Physical Properties of Superconducting Compound Films Formed by the Electron-Beam Codeposition of the Elements," J. Vac. Sci. Technol., 15(2), pp. 382-385, 1978.
Bednorz et al., "Possible High Tc Superconductivity in the Ba-La-Cu-O System," Z. Phys. B-Condensed Matter, 64, 189-192 (1986).

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