Method for producing thin film of oxide superconductor

Details Method for producing thin film of oxide superconductor Method for producing thin film of oxide superconductor

1988-03-30

1991-05-21

Morgenstern, Norman

Superconductor technology: apparatus, material, process

High temperature , per se

Having tc greater than or equal to 150 k

505732, 505704, 427 38, 427 62, 427 42, 4272553, 4271263, 427117, B05D 512, B05D 306, C23C 1600

Patent

active

050175505

ABSTRACT:
A thin film of an oxide superconductor having a homogeneous composition and less oxygen defects is produced by independently vaporizing onto a substrate at least one material selected from the group consisting of the elements of Ia, IIa and IIIa groups of the periodic table and their compounds and one material selected from the group consisting of Cu and its compounds and irradiating the substrate with oxygen ions and depositing the vaporized materials together with oxygen on the substrate to form the thin film of the oxide superconductor.

REFERENCES:
patent: 4430366 (1984-02-01), Crawford et al.
patent: 4861750 (1989-08-01), Nogawa et al.
Bednorz et al., "Possible High Tc Superconductivity in the Ba-La-Cu-O System", Z. Phys. B-Condensed Matter 64,189-192 (1986).
Hammond et al., "Superconducting Thin Films of the Perovskite Superconductors by Electron-Beam Deposition".
Extended Abstracts, "High Temperature Superconductors", Edited by Gubser et al., Apr., 1987, pp. 169-171.
Hammond, "Synthesis and Physical Properties of Superconducting Compound Films formed by the Electron-Beam Codeposition of the Elements", J. Vac. Sci. Technol. 15(2), pp. 382-385, 1978.
Cava et al, "Bulk Superconductivity at 36k in La.sub.1.8 Sr.sub.0.2 CuO.sub.4 ", Phys. Rev. Lett., vol. 58(4), Jan. 1987, pp. 408-410.
Hoffman et al, "Effect of Substrate Potential on Al.sub.2 O.sub.3 Films Prepared by Electron Beam Evaporation", J. Vac. Sci. Tech., vol. 9(1), 1972, pp. 326-329.
P. J. Martin et al., "Ion-Beam-Assisted Deposition of Thin Films", Applied Optics, vol. 22, No. 1, Jan. 1, 1983, pp. 178-184.
M. K. Wu et al., "Superconductivity at 93 K in a New Mixed-Phase Y-Ba-Cu-O Compound System at Ambient Pressure", Physical Review Letters, vol. 58, No. 9, Mar. 2, 1987, pp. 908-910.

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