Method for producing the head of an ink-jet recording apparatus

Semiconductor device manufacturing: process – Manufacture of electrical device controlled printhead

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347 54, 347 55, 216 27, 298901, H01L 2100

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active

061176982

ABSTRACT:
A laminated, multi-substrate ink jet head and methods creating the same, wherein the ink jet head includes nozzle holes, emitting chambers respectively led to the nozzle holes, diaphragms formed on a wall of the emitting chambers, a common ink cavity for supplying ink to the emitting chambers through orifices and electrodes placed so as to face to the diaphragms so as to drive the diaphragms by static electricity. The lower substrate which forms the electrodes may include a plurality of indentations for mounting the electrode therein to serve as a gap spacing element for respective diaphragm/electrode pairs when the head is assembled. Alternatively, areas immediately beneath the diaphragm may be etched away to expand the vibrating chamber to a predetermined gap distance, or a membrane of a predetermined thickness may interpose the respective diaphragm and electrode substrates.

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Patent Abstract of Japan, Oct. 29, 1998, vol. 18, No. 66.

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