Single-crystal – oriented-crystal – and epitaxy growth processes; – Processes of growth from liquid or supercritical state – Having pulling during growth
Patent
1998-09-29
2000-08-29
Garrett, Felisa
Single-crystal, oriented-crystal, and epitaxy growth processes;
Processes of growth from liquid or supercritical state
Having pulling during growth
117 18, 117 30, 117 33, C30B 1520
Patent
active
061102725
ABSTRACT:
A method of loading a crucible, comprises loading at least one polycrystalline silicon rod into the crucible. Lump and/or granular polycrystalline silicon may also be loaded into the crucible. Especially when loaded into the crucible in a close-packed pyramidal configuration, a high loading density is achieved.
REFERENCES:
patent: 5462010 (1995-10-01), Takano et al.
patent: 5588993 (1996-12-01), Holder
patent: 5814148 (1998-09-01), Kim et al.
patent: 5902395 (1999-05-01), Nagai et al.
patent: 5919303 (1999-07-01), Holder
Aikawa Katsunori
Inoue Kuniharu
Garrett Felisa
Sumitomo Sitix Corporation
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