Coating processes – Electrical product produced – Condenser or capacitor
Patent
1980-06-16
1982-07-27
Lusignan, Michael R.
Coating processes
Electrical product produced
Condenser or capacitor
427 93, 4272554, 4272557, 427255, 4272481, 427300, 427350, 427377, B05D 512
Patent
active
043418180
ABSTRACT:
The efficient production of sequential layers of silicon dioxide and polycrystalline silicon is possible using a specific set of reaction steps. This set of reaction steps includes the oxidation of silicon at low oxygen pressure and at temperatures of the magnitude of 900 degrees C., followed by the deposition of polycrystalline silicon at substantially the same temperature utilizing a dichloride silane chemical vapor deposition (CVD) process.
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Adams Arthur C.
Levinstein Hyman J.
Bell Telephone Laboratories Incorporated
Bueker Richard
Lusignan Michael R.
Schneider Bruce S.
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