Method for producing silica glass for use with light in a vacuum

Glass manufacturing – Processes of manufacturing fibers – filaments – or preforms – Process of manufacturing optical fibers – waveguides – or...

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C03B 37075, C03C 1300, G02B 600

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056791259

ABSTRACT:
A method for producing a synthetic silica glass for use with vacuum ultraviolet light comprises the steps of: (a) producing a soot preform; (b) heating the soot preform in an atmosphere containing fluorine to obtain a fluorine-doped soot preform; (c) consolidating the fluorine-doped soot preform to obtain a fluorine-doped synthetic silica glass; and (d) heating the fluorine-doped synthetic silica glass in an atmosphere containing hydrogen gas to obtain a synthetic silica glass doped with fluorine and hydrogen molecules. A synthetic silica glass having both a high transmittance and high ultraviolet light resistance with respect to light in the vacuum ultraviolet wavelength range can be produced.

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Khotimchenko et al., "Determining the Content of Hydrogen Dissolved in Quartz Glass Using the Methods of Raman Scattering and Mass Spectrometry", translated from Zhurnal Prikladnoi Spectroskopii, vol. 46, No. 6, pp. 987-991, Jun. 1987.

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