Method for producing shaped article of silicon carbide

Coating processes – Heat decomposition of applied coating or base material – Coating decomposed to form carbide or coating carbonized

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427227, 427249, 427377, 4273977, 427450, 427452, B05D 302

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057832552

ABSTRACT:
A high quality shaped article of silicon carbide is efficiently produced by using a carbon substrate suitable for the production of a silicon carbide film without generating cracking or breakage. In a method of producing a shaped article of silicon carbide while using a carbonaceous material as a deposition substrate by decomposing halogenated organic silicone compound by a reduction pyrolysis at a high temperature, forming a silicon carbide film layer on a surface of the substrate by CVD and removing the carbon substrate, the carbon substrate is formed of a composite of graphite and amorphous carbon obtained by shaping and firing a mixture of a powdery graphite and an organic substance.

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