Fishing – trapping – and vermin destroying
Patent
1987-09-14
1989-01-03
Ozaki, George T.
Fishing, trapping, and vermin destroying
437922, H01L 21465, H01L 21473
Patent
active
047957204
ABSTRACT:
Herein disclosed are a method of producing a semiconductor device. Especially in a device constructed to have a defective circuit replaced by a redundant circuit, after a fuse is cut by exposure to a laser beam, a portion to be fused is irradiated in a predetermined gas atmosphere with an optical ray to selectively form a CVD film thereby to form a protection film over the fuse so that the formation of the protection film is simplified after the fuse is cut, whereby any rise in the production cost is suppressed while improving the production yield and reliability.
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Baurle, `Laser Induced Chemical Vapor Deposition`, Surface Studies with Lasers, Proc. of International Conf. Mauterndof Austria, Mar. 1983, pp. 178-188.
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Hongo Mikio
Inoue Morio
Kawanabe Takao
Hitachi , Ltd.
Ozaki George T.
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