Method for producing semiconductor devices

Details Method for producing semiconductor devices Method for producing semiconductor devices

1984-02-02

1985-03-05

O'Keefe, Veronica

Coating processes

Electrical product produced

Condenser or capacitor

148 616, 148174, 428620, 427 87, 427 93, H01L 2148, H01L 4902, H05K 336

Patent

active

045030898

ABSTRACT:
A composite article, and method for producing the same, said article being adapted for use as a semiconductor device. The composite article comprises and is produced by depositing on a first layer of metal having an irregular metal surface a second layer consisting essentially of a phosphate, silicate or a combination thereof, said second layer having a thickness sufficient to provide a smooth surface over said irregular metal surface and a third layer of a conventional semiconductor material coated on said smooth surface.

REFERENCES:
patent: 3703419 (1972-11-01), Esler
patent: 3961997 (1976-06-01), Chu
patent: 4273594 (1981-06-01), Heller et al.
patent: 4331707 (1982-05-01), Muruska et al.

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