Method for producing semiconductor device

Details Method for producing semiconductor device Method for producing semiconductor device

1981-10-28

1983-02-01

Demers, Arthur P.

Metal treatment

Process of modifying or maintaining internal physical...

Chemical-heat removing or burning of metal

148 15, 204192E, 204192EC, H01L 744, C23C 1500

Patent

active

043714072

ABSTRACT:
A method for producing a semiconductor device comprises the steps of:

REFERENCES:
patent: 3940506 (1976-02-01), Heinecke
patent: 4140547 (1979-02-01), Shibata et al.
patent: 4179311 (1979-12-01), Athanas
patent: 4244799 (1981-01-01), Fraser
patent: 4283249 (1981-08-01), Ephrath
patent: 4293375 (1981-10-01), Neukomm
patent: 4311533 (1982-01-01), Roche
patent: 4333793 (1982-06-01), Lifshitz
E.C.S. Spring Meeting Extended Abstract 157, No. 99 263 (1980), T. Arikado and S. Horiuchi, May 11-16, (1980).
Journal of the Electrochemical Society--Extended Abstracts, vol. 80, No. 1, May 1980, Princeton.

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