Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Responsive to electromagnetic radiation
Reexamination Certificate
2003-10-22
2008-03-18
Mulpuri, Savitri (Department: 2812)
Semiconductor device manufacturing: process
Making device or circuit responsive to nonelectrical signal
Responsive to electromagnetic radiation
C438S096000, C438S097000, C438S495000, C257SE21106
Reexamination Certificate
active
07344909
ABSTRACT:
A semi-conducting device has at least one layer doped with a doping agent and a layer of another type deposited on the doped layer in a single reaction chamber. An operation for avoiding the contamination of the other layer by the doping agent separates the steps of depositing each of the layers.
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Ballutaud Juliette
Bucher Cédric
Hollenstein Christoph
Howling Alan
Kroll Ulrich
Mulpuri Savitri
OC Oerlikon Balzers AG
Pearne & Gordon LLP
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