Chemistry: electrical and wave energy – Processes and products
Patent
1980-12-22
1982-07-06
Tufariello, T.
Chemistry: electrical and wave energy
Processes and products
204 12, 204 32R, C25D 120, C25D 554
Patent
active
043381642
ABSTRACT:
A method for producing planar surfaces having very fine peaks in the micron range or smaller, e.g. planar field emission cathodes, of conductive or semiconductive material, by filling cavities in a matrix. A sheet of the planar dielectric material is irradiated with high energy ions, e.g. from a heavy ion accelerator to form nuclear traces therein, and is subsequently subjected to an etching process to expose the nuclear traces. Thereafter, the hole-like nuclear traces or cavities are filled with conductive or semiconductive material and one surface of the sheet of planar material is covered, at the open ends of the nuclear traces or cavities, with a coating of likewise conductive or semiconductive material. If desired the matrix of planar material may subsequently be removed.
REFERENCES:
patent: 3922206 (1975-11-01), Thackray
patent: 4153654 (1979-05-01), Maffitt
Spindt et al., "Physical Properties of Thin Field Emission Cathodes with Molybdenum Cones," Journal of Applied Physics, vol. 47, No. 12, Dec. 1976, pp. 5248-5263.
Thomas et al., "Fabrication and Some Application of Large-Area Silicon Field Emission Arrays", Solid State Electronics, vol. 17, 1974, pp. 155-163.
Gesellschaft fur Schwerionenforschung GmbH
Tufariello T.
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