Method for producing planar electron radiating device

Details Method for producing planar electron radiating device Method for producing planar electron radiating device

1992-03-13

1993-06-15

Seidel, Richard K.

Electric lamp or space discharge component or device manufacturi

Process

With assembly or disassembly

445 51, 313309, 313336, H01J 912, H01J 130

Patent

active

052193101

ABSTRACT:
A method for producing a planar type electron radiating device including a plurality of cathodes having pointed ends on a major surface of a substrate, and a gate electrode having holes in the vicinity of the cathodes, is disclosed. After a hole is formed in the gate electrode and a silicon oxide film for laying a part of the major surface of the substrate to outside, a chromium thin film as a tight metal bonding film is deposited on the bottom of the hole prior to formation of the cathode, and the cathode is formed on the chromium thin film to prevent the cathode from being detached during the production process.

REFERENCES:
patent: 3789471 (1974-02-01), Spindt et al.
patent: 3998678 (1976-12-01), Fukase et al.

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