Method for producing piezoelectric actuator, method for...

Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices

Reexamination Certificate

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C310S324000, C347S068000

Reexamination Certificate

active

07919904

ABSTRACT:
A film-forming nozzle is moved so that a boundary portion of a plurality of areas on which a piezoelectric material layer is formed by a film-forming nozzle moving relative to a vibration plate is positioned outside deformable portions of the vibration plate and overlaps with restricted portions. This reduces stress concentration on a portion of the piezoelectric layer corresponding to the boundary portion of the deposition areas, and therefore, damage of the piezoelectric material layer is prevented.

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patent: 1 617 491 (2006-01-01), None
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patent: 2004-122341 (2004-04-01), None
patent: 2005-154803 (2005-06-01), None

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