Method for producing piezoelectric actuator and method for...

Details Method for producing piezoelectric actuator and method for... Method for producing piezoelectric actuator and method for...

2011-01-04

2011-01-04

Tugbang, A. Dexter (Department: 3729)

Metal working

Piezoelectric device making

C029S890100, C427S100000, C427S376200, C427S380000, C427S427000

Reexamination Certificate

active

07861386

ABSTRACT:
In the annealing step of the method for manufacturing a piezoelectric actuator, the annealing in conducted in two steps: a first annealing step; and a second annealing step conducted at a temperature lower and for a time longer than those of the first annealing step. With such treatment, first, grain growth inside the piezoelectric film can be sufficiently induced, while minimizing the diffusion layer growth, by the first annealing step conducted at a high temperature within a short interval, and then lattice defects in the particles can be sufficiently corrected, while preventing the diffusion layer growth, by the second annealing step conducted at a temperature lower and for a time longer than those of the first annealing step. Accordingly, the piezoelectric characteristic can be improved by sufficiently conducting annealing, while restricting the thickness of the diffusion layer to a range where the piezoelectric characteristic is not affected.

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Araújo, E. B., Effects of crystallization conditions on dielectric and ferroelectric properties of PZT films, Jul. 31, 2003 Journal of Physics D: Applied Physics, vol. 36, pp. 2010-2013.

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