Electrolysis: processes – compositions used therein – and methods – Electrolytic erosion of a workpiece for shape or surface...
Reexamination Certificate
2002-03-05
2008-09-02
Wilkins, III, Harry D. (Department: 1795)
Electrolysis: processes, compositions used therein, and methods
Electrolytic erosion of a workpiece for shape or surface...
C205S646000, C257SE21215, C257SE21232
Reexamination Certificate
active
07419581
ABSTRACT:
A simple and cost-effective possibility is proposed for producing optically transparent regions (5, 6) in a silicon substrate (1), by the use of which both optically transparent regions of any thickness and optically transparent regions over a cavity in a silicon substrate are able to be implemented.For this purpose, first at least a specified region (5, 6) of the silicon substrate (1) is etched porous. Thereafter, the specified porous region (5, 6) of the silicon substrate (1) is oxidized.
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Artmann Hans
Benzel Hubert
Schaefer Frank
Weber Heribert
Kenyon & Kenyon LLP
Robert & Bosch GmbH
Smith Nicholas A.
Wilkins, III Harry D.
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