Method for producing nonvolatile memory used as read-only storag

Details Method for producing nonvolatile memory used as read-only storag Method for producing nonvolatile memory used as read-only storag

1995-11-02

1997-02-18

Chaudhari, Chandra

Fishing, trapping, and vermin destroying

437 34, 437935, H01L 218246

Patent

active

056041438

ABSTRACT:
A nonvolatile memory producing apparatus has a data computing section 31, an electron patterning section 33 for patterning a wafer 3 by using an electron beam, a control section 32 for controlling +the electron patterning section 33 on the basis of the result from the data computing section 31. The data computing section 31 prepares binary codes for individual IC chips formed on the wafer 3, and generates coordinate regarding the wafer 3 and the IC chips. The data computing section 31 computes direct draw data for each IC chip based on the binary codes, and generates direct pattern data based on the binary codes and the direct draw data. The control section 32 and the electron-beam patterning section 33 cooperate to perform direct electron-beam patterning on the IC chips in accordance with the pattern data.

REFERENCES:
patent: 4176442 (1979-12-01), Bischoff et al.
patent: 5091329 (1992-02-01), Bekkering et al.
patent: 5262342 (1993-11-01), Toyama et al.
patent: 5279982 (1994-01-01), Crotti

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