Induced nuclear reactions: processes – systems – and elements – Nuclear transmutation – By neutron bombardment
Patent
1980-04-21
1982-09-07
Behrend, Harvey E.
Induced nuclear reactions: processes, systems, and elements
Nuclear transmutation
By neutron bombardment
G21G 106
Patent
active
043483518
ABSTRACT:
A method for controlling dopant variation in neutron silicon is provided wherein the selection of undoped single crystal silicon for neutron transmutation doping is based upon certain criteria, for example, a maximum dopant difference which depends only on the desired uniformity of the neutron doped material and a maximum average dopant concentration which is a function of the homogeneity of both the undoped single crystal silicon and the neutron doped product. The results achievable from using the method for controlling dopant variation in the neutron doped silicon provides uniformity of the neutron doped product determinable by the correct choice of dopant difference and dopant factor, and that the doping precision for the radiated silicon does not depend on the doping factor.
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Behrend Harvey E.
Croskell Henry
Duffey William H.
Monsanto Company
Passley Paul L.
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