Method for producing native oxides on compound semiconductors

Details Method for producing native oxides on compound semiconductors Method for producing native oxides on compound semiconductors

1994-11-15

1996-09-24

Breneman, R. Bruce

Fishing, trapping, and vermin destroying

437107, 437126, 437133, 437132, H01L 2102

Patent

active

055590586

ABSTRACT:
A method of growing a native oxide on a compound semiconductor material, comprising contacting the compound semiconductor material with an oxygen containing fluid, and pulsing a current between the compound semiconductor material the fluid, is presented. A "traveling oxide" can be produced when the oxygen containing fluid etches the native oxide. To obtain smooth oxides when the compound semiconductor material contains layers of different material, the oxide growth is monitored, and the pulse parameters changed in response to the monitoring of the oxide growth.

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