Method for producing multi diaphragm structure

Details Method for producing multi diaphragm structure Method for producing multi diaphragm structure

1997-02-19

1998-09-22

Hall, Carl E.

Metal working

Piezoelectric device making

264618, 310364, H01L 4122

Patent

active

058096264

ABSTRACT:
To a ceramic green sheet for a substrate, in which holes for throughholes were formed, a ceramic connecting paste is printed so that a plurality of non-printed portions corresponding to a disposition pattern of a plurality of inner spaces are formed, and a connecting layer for dividing a space into sections is formed so that the connecting paste is not present in portions where the plurality of inner spaces are formed. Then, a thin ceramic green sheet for a diaphragm plate the thin diaphragm plate, is superposed on the connecting layer to obtain a laminate, and the laminate is fired to obtain a unitary multidiaphragm structure. The method provides a multidiaphragm structure free from exfoliation of a laminated layer caused between laminated green sheets and free from deformation of a diaphragm portion caused by punching or handling.

REFERENCES:
patent: 4610741 (1986-09-01), Mase et al.
patent: 5636072 (1997-06-01), Shibata et al.

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