Glass manufacturing – Processes – Reshaping or surface deformation of glass preform
Reexamination Certificate
2005-10-04
2005-10-04
Griffin, Steven P. (Department: 1731)
Glass manufacturing
Processes
Reshaping or surface deformation of glass preform
C065S104000, C065S107000, C065S273000
Reexamination Certificate
active
06951119
ABSTRACT:
What is proposed here is a method of structuring surfaces of glass-type materials and variants of this method, comprising the following steps of operation: providing a semiconductor substrate, structuring, with the formation of recesses, of at least one surface of the semiconductor substrate, providing a substrate of glass-type material, joining the semiconductor substrate to the glass-type substrate, with a structured surface of the semiconductor substrate being joined to a surface of the glass-type substrate in an at least partly overlapping relationship, and heating the substrates so bonded by annealing in a way so as to induce an inflow of the glass-type material into the recesses of the structured surface of the semiconductor substrate. The variants of the method are particularly well suitable for the manufacture of micro-optical lenses and micro-mechanical components such as micro-relays or micro-valves.
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Merz Peter
Quenzer Hans-Joachim
Schulz Arne Veit
Burns Doane , Swecker, Mathis LLP
Fraunhofer-Gesellschaft zur Forderung der Angewandten Forschung
Griffin Steven P.
Lopez Carlos
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