Semiconductor device manufacturing: process – Having organic semiconductive component
Reexamination Certificate
2010-09-10
2011-11-01
Nguyen, Ha Tran T (Department: 2829)
Semiconductor device manufacturing: process
Having organic semiconductive component
Reexamination Certificate
active
08048712
ABSTRACT:
A method for producing at least one pattern on a top surface of a support made from a material presenting a first thermal conductivity comprises a step of arranging of a mask made from a material presenting a second thermal conductivity and comprising at least one recess having a shape corresponding to that of the pattern, in contact with a bottom surface of the support, the ratio of the first conductivity over the second conductivity being greater than or equal to 2, or smaller than or equal to ½, throughout the duration of the method. The method further comprises a step of depositing on the top surface a solution comprising a material designed to form the pattern, and a step of evaporating the solution.
REFERENCES:
patent: 2004/0082183 (2004-04-01), Mori
patent: 2005/0112294 (2005-05-01), Masuda et al.
patent: 2006/0057293 (2006-03-01), Sharma et al.
patent: 2007/0232035 (2007-10-01), Ramsdale et al.
patent: WO 2005/112146 (2005-11-01), None
Schaffer et al., “Thermomechanical Lithography: Patern Replication Using a Temperature Gradient Driven Instability,” Advanced Materials, Mar. 17, 2003, pp. 514-517, vol. 15-No. 6.
Campbell Shaun
Commissariat à l'Energie Atomique et aux Energies Alternati
Nguyen Ha Tran T
Oliff & Berridg,e PLC
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