Method for producing liquid-jet head

Details Method for producing liquid-jet head Method for producing liquid-jet head

2008-07-22

2008-07-22

Culbert, Roberts (Department: 1792)

Etching a substrate: processes

Forming or treating thermal ink jet article

C438S021000, C029S890100

Reexamination Certificate

active

11234266

ABSTRACT:
A method for producing a liquid-jet head comprises the steps of: forming a vibration plate and piezoelectric elements on one surface of a passage-forming substrate, and removing the vibration plate in a region to be a communicating portion, thereby forming an exposed portion; forming a wiring layer on the passage-forming substrate within the exposed portion, and forming lead electrodes; bonding a reservoir forming plate to the one surface of the passage-forming substrate; wet-etching the passage-forming substrate at the other surface thereof to form pressure generating chambers and the communicating portion; forming a liquid-resistant protective film on inner surfaces of the pressure generating chambers and the communicating portion; removing the protective film within the exposed portion; and performing wet etching on the communicating portion side to remove the wiring layer, thereby establishing communication between a reservoir portion and the communicating portion.

REFERENCES:
patent: 6758554 (2004-07-01), Kamei et al.
patent: 2004/0134881 (2004-07-01), Shimada et al.
patent: 2003-159801 (2003-06-01), None

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