Method for producing laser with resonant reflector

Details Method for producing laser with resonant reflector Method for producing laser with resonant reflector

2007-09-04

2007-09-04

Harvey, Minsun Oh (Department: 2828)

Coherent light generators

Particular beam control device

Mode discrimination

C257S098000

Reexamination Certificate

active

10819654

ABSTRACT:
In one exemplary embodiment of the invention, a method is employed that is directed to forming a resonant reflector on an optoelectronic device, such as a semiconductor laser for example. The exemplary method involves depositing a first material layer on the top layer of the optoelectronic device, where the first material layer having a refractive index and a thickness of about an odd multiple of a quarter of a wavelength to which the optoelectronic device is tuned. A patterned region is then created that extends at least partially into the first material layer. Selected patterned regions are at least partially filled with a second material that has a refractive index that is greater than the refractive index of the first material layer. Finally, a third layer, having a refractive index greater than the refractive index of the first material layer, is deposited immediately adjacent the first material layer.

REFERENCES:
patent: 4317085 (1982-02-01), Brunham et al.
patent: 4466694 (1984-08-01), MacDonald
patent: 4660207 (1987-04-01), Svilans
patent: 4784722 (1988-11-01), Liau et al.
patent: 4885592 (1989-12-01), Kofol et al.
patent: 4901327 (1990-02-01), Bradley
patent: 4943970 (1990-07-01), Bradley
patent: 4956844 (1990-09-01), Goodhue et al.
patent: 5031187 (1991-07-01), Orenstien et al.
patent: 5034958 (1991-07-01), Kwon et al.
patent: 5052016 (1991-09-01), Mahbobzadeh et al.
patent: 5056098 (1991-10-01), Anthony et al.
patent: 5062115 (1991-10-01), Thornton
patent: 5068869 (1991-11-01), Wang et al.
patent: 5115442 (1992-05-01), Lee et al.
patent: 5140605 (1992-08-01), Paoli et al.
patent: 5158908 (1992-10-01), Blonder et al.
patent: 5216263 (1993-06-01), Paoli
patent: 5216680 (1993-06-01), Magnusson et al.
patent: 5237581 (1993-08-01), Asada et al.
patent: 5245622 (1993-09-01), Jewell et al.
patent: 5258316 (1993-11-01), Ackley et al.
patent: 5258990 (1993-11-01), Olbright et al.
patent: 5285466 (1994-02-01), Tabatabaie
patent: 5293392 (1994-03-01), Shieh et al.
patent: 5317170 (1994-05-01), Paoli
patent: 5317587 (1994-05-01), Ackley et al.
patent: 5325386 (1994-06-01), Jewell et al.
patent: 5331654 (1994-07-01), Jewell et al.
patent: 5337074 (1994-08-01), Thornton
patent: 5349599 (1994-09-01), Larkins
patent: 5351256 (1994-09-01), Schneider et al.
patent: 5359447 (1994-10-01), Hahn et al.
patent: 5359618 (1994-10-01), Lebby et al.
patent: 5363397 (1994-11-01), Collins et al.
patent: 5373520 (1994-12-01), Shoji et al.
patent: 5404373 (1995-04-01), Cheng
patent: 5416044 (1995-05-01), Chino et al.
patent: 5428634 (1995-06-01), Bryan et al.
patent: 5446754 (1995-08-01), Jewell et al.
patent: 5475701 (1995-12-01), Hibbs-Brenner
patent: 5513202 (1996-04-01), Kobayashi et al.
patent: 5530715 (1996-06-01), Shieh et al.
patent: 5555255 (1996-09-01), Kock et al.
patent: 5557626 (1996-09-01), Grodinski et al.
patent: 5561683 (1996-10-01), Kwon
patent: 5568499 (1996-10-01), Lear
patent: 5574738 (1996-11-01), Morgan
patent: 5598300 (1997-01-01), Magnusson et al.
patent: 5606572 (1997-02-01), Swirhun et al.
patent: 5642376 (1997-06-01), Olbright et al.
patent: 5727013 (1998-03-01), Botez et al.
patent: 5774487 (1998-06-01), Morgan
patent: 5818066 (1998-10-01), Duboz
patent: 5838715 (1998-11-01), Corzine et al.
patent: 5903590 (1999-05-01), Hadley et al.
patent: 5940422 (1999-08-01), Johnson
patent: 5978401 (1999-11-01), Morgan
patent: 6026111 (2000-02-01), Jian et al.
patent: 6055262 (2000-04-01), Cox et al.
patent: 6078601 (2000-06-01), Smith
patent: 6144682 (2000-11-01), Sun
patent: 6185241 (2001-02-01), Sun
patent: 6215928 (2001-04-01), Friesem et al.
patent: 6238944 (2001-05-01), Floyd
patent: 6411638 (2002-06-01), Johnson et al.
patent: 6727520 (2004-04-01), Morgan et al.
patent: 6878958 (2005-04-01), Zhu
patent: 2004/0188695 (2004-09-01), Morgan et al.
patent: 4 240 706 (1994-06-01), None
patent: 0 288 184 (1988-10-01), None
patent: 0 712 182 (1996-05-01), None
patent: 0 776 076 (1997-05-01), None
patent: 2 768 566 (1999-03-01), None
patent: 60-123084 (1985-07-01), None
patent: 02-054981 (1990-02-01), None
patent: 5-299779 (1993-11-01), None
patent: 2000-330124 (2000-11-01), None
patent: WO99/31735 (1999-06-01), None
patent: WO 00/45483 (2000-08-01), None
US 5,778,078, 07/1998, Yoshikawa et al. (withdrawn)
Morgan et al. (“Hybrid dielectric / AlGaAs mirror spatially filtered vertical cavity top-surface emitting laser,” APL vol. 66, No. 10, Mar. 1995, pp. 1157-1159).
International Search Report, dated Mar. 12, 2003, relative to PCT Application No. PCT/US 01/50214, the foreign equivalent to the instant U.S. Appl. No. 09/751,423.
Banwell, et al., “VCSE laser Transmitters for Parallel Data Links,”IEEE Journal of Quantum Electronics, vol. 29, No. 2, Feb. 1993, pp. 635-644.
Catchmark, et al., “High Temperature CW Operation of Vertical Cavity Top Surface-Emitting Lasers,” CLEO 1993, p. 138.
Jewell, et al., “Surface Emitting Microlasers for Photonic Switching & Intership Connections,”Optical Engineering, vol. 29, No. 3, Mar. 1990, pp. 210-214.
Lehman, et al., “High Frequency Modulation Characteristics of Hybrid Dielectric/AlGaAs Mirror Singlemode VCSELs,”Electronic Letters, vol. 31, No. 15, pp. 1251-1252, Jul. 20, 1995.
Morgan, et al., Hybride Dielectric/AlGaAs Mirror Spatially Filtered Vertical Cavity Top-Surface Emitting Laser,Applied Physics Letters, vol. 66, No. 10, Mar. 6, 1995, pp. 1157-1559.
Morgan, et al., “Transverse Mode Control of Vertical-Cavity Top-Surface Emitting lasers,”IEEE Photonics Technology Letters, vol. 4, No. 4, Apr. 1993, pp. 374-377.
U.S. Appl. No. 09/751,422, filed Dec. 29, 2000, entitled “Resonant Reflector for Use with Optoelectronic Devices.”
Guenter, et al., “Reliability of Proton-Implanted VCSELs for Data Communications,” Invited Paper,SPIE, Vo., 2683, OE LASE 96, Photonics West: Fabrication, Testing and Reliability of Semiconductors Lasers,, (SPIE, Bellingham, WA 1996).
Hibbs-Brenner, et al., “Performance, Uniformity and Yield of 850nm VCSELs Deposited by MOVPE,”IEEE Photonics Technology Letters, vol. 8, No. 1, Jan. 1996, pp. 7-9.
Hornak, et al., “Low-Temperature (10K-300K0 Characterization of MOVPE-Grown Vertical-Cavity Surface-Emitting Lasers,”Photonics Technology Letters, vol. 7, No. 10, Oct. 1995, pp. 1110-1112.
Huffaker, et al., “Lasing Characteristics of Low Threshold Microcavity Layers Using Half-Wave Spacer Layers and Lateral Index Confinement,”Applied Physics Letters, vol. 66, No. 14, Apr. 3, 1995, pp. 1723-1725.
K. L. Lear, et al., “Selectively Oxidized Vertical Cavity Surface-Emitting Lasers with 50% Power Conversion Efficiency,”Electronic Letters, vol. 31, No. Feb. 2, 1995, pp. 208-209.
Magnusson, “Integration of Guided-Mode Resonance Filters and VCSELs,” Electo-Optics Research Center, Department of Electrical Engineering, University of Texas at Arlington, May 6, 1997.
Morgan, et al. “One Watt Vertical Cavity Surface Emitting Laser,”Electronic Letters, vol. 29, No. 2, Jan. 21, 1993, pp. 206-207.
Morgan, et al., “Producible Ga-AS-based MOVPE-Grown Vertical-Cavity Top-Surface Emitting Lasers with Record Performance.”Elec. Lett., vol. 31, No. 6, pp. 462-464, Mar. 16, 1995.
Morgan, et al., “Spatial-Filtered Vertical-Cavity Top Surface-Emitting Lasers,” CLEO, 1993, pp. 138-139.
Morgan, et al., “Vertical Cavity Surface Emitting Laser Arrays: Come of Age,” Invited Paper,SPIE, vol. 2683, 0-8194-2057-3/96, pp. 18-29.
S.S. Wang and R. Magnusson, “Multilayer Waveguide-Grating Filters,”Appl. Opt., vol. 34, No. 14, pp. 2414-2420, 1995, May 1995.
S.S. Wang and R. Magnusson, “Theory and Applications of Guided-Mode Resonance Filters,”Appl. Opt., vol. 32, No. 14, pp. 2606-2613, 1993.
Y. M. Yang, et al., “Ultralow Threshold Current Vertical Cavity Surface Emitting Lasers Obtained with Selective Oxidation,”Electronic Letter, vol. 31, No. 11, Mary 25, 1995, pp. 886-888.
Yablonovitch, et

Affiliated with

Also associated with

Rating

Method for producing laser with resonant reflector does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method for producing laser with resonant reflector, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method for producing laser with resonant reflector will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3732021