Method for producing ink jet recording head

Details Method for producing ink jet recording head Method for producing ink jet recording head

2005-07-29

2009-12-22

Tugbang, A. Dexter (Department: 3729)

Metal working

Method of mechanical manufacture

Fluid pattern dispersing device making, e.g., ink jet

C029S025350, C216S027000, C347S068000, C347S070000, C427S100000

Reexamination Certificate

active

07634855

ABSTRACT:
A producing method for a liquid discharge head having a pressure generation chamber communicating with a discharge port for discharging a liquid, a piezoelectric element provided corresponding to the pressure generation chamber, and a vibration plate provided between the pressure generation chamber and the piezoelectric element, the method including:a preparation step of preparing a flat plate-shaped substrate having a recess on a main surface thereof, a piezoelectric element forming step of forming the piezoelectric element in the recess, a vibration plate forming step of forming the flat vibration plate on the main surface of the substrate and the piezoelectric element, a pressure generation chamber forming step of forming the pressure generation chamber on the vibration plate, and a removing step of removing the substrate in at least a peripheral portion of the piezoelectric element.

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